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Proceedings Paper

MEMS reliability for space applications by elimination of potential failure modes through testing and analysis
Author(s): Kin F. Man
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Paper Abstract

As the design of Micro-Electro-Mechanical Systems (MEMS) devices matures and their application extends to critical areas, the issues of reliability and long-term survivability become increasingly important. This paper reviews some general approaches to addressing the reliability and qualification of MEMS devices for space applications. The failure modes associated with different types of MEMS devices that are likely to occur, not only under normal terrestrial operations, but also those that are encountered in the harsh environments of space, will be identified.

Paper Details

Date Published: 18 August 1999
PDF: 10 pages
Proc. SPIE 3880, MEMS Reliability for Critical and Space Applications, (18 August 1999); doi: 10.1117/12.359361
Show Author Affiliations
Kin F. Man, Jet Propulsion Lab. (United States)


Published in SPIE Proceedings Vol. 3880:
MEMS Reliability for Critical and Space Applications
Russell A. Lawton; William M. Miller; Gisela Lin; Rajeshuni Ramesham, Editor(s)

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