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Proceedings Paper

Generation of large-area microscale manifolds using excimer laser ablation
Author(s): Simon Zhou; Marvin M. Kilgo; Charles N. Williams
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Paper Abstract

Excimer laser ablation of polymeric materials is a widely used technology for the generation of nozzles and through- holes. Ablation is also a viable process to create more complex fluidic structures such as channels and manifolds. This paper presents recent results of experiments demonstrating the creation of manifolds in 25 micrometers polyimide films. These structures include cross-over points, and channels of various widths. The results presented include photomicrographs and SEMS, and characterization of channel wall taper and width control as well as an assessment of ablation depth uniformity over large fields. The characteristics of projection ablation systems are reviewed, and the experimental system is described in detail.

Paper Details

Date Published: 19 August 1999
PDF: 8 pages
Proc. SPIE 3877, Microfluidic Devices and Systems II, (19 August 1999); doi: 10.1117/12.359342
Show Author Affiliations
Simon Zhou, Tamarack Scientific Co., Inc. (United States)
Marvin M. Kilgo, Tamarack Scientific Co., Inc. (United States)
Charles N. Williams, Tamarack Scientific Co., Inc. (United States)

Published in SPIE Proceedings Vol. 3877:
Microfluidic Devices and Systems II
Chong Hyuk Ahn; A. Bruno Frazier, Editor(s)

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