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Proceedings Paper

Mesoscale electromagnetically actuated normally closed valve realized on LTCC tapes
Author(s): Mario Gongora-Rubio; Luis Sola-Laguna; Michael A. Smith; Jorge J. Santiago-Aviles
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Paper Abstract

Sensors and actuators with promising characteristics in aggressive environments and high temperatures have been developed using low temperature co-fired ceramic tape technology. We would like to report our work on an electro- magnetically actuated normally closed valve.

Paper Details

Date Published: 19 August 1999
PDF: 10 pages
Proc. SPIE 3877, Microfluidic Devices and Systems II, (19 August 1999); doi: 10.1117/12.359341
Show Author Affiliations
Mario Gongora-Rubio, Instituto de Pesquisas Tecnologicas do Estado de Sao Paulo (Brazil)
Luis Sola-Laguna, Dupont Photopolymer & Electronic Materials (United States)
Michael A. Smith, Dupont Photopolymer & Electronic Materials (United States)
Jorge J. Santiago-Aviles, Univ. of Pennsylvania (United States)

Published in SPIE Proceedings Vol. 3877:
Microfluidic Devices and Systems II
Chong Hyuk Ahn; A. Bruno Frazier, Editor(s)

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