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Proceedings Paper

Fabrication and characterization of three-dimensional microfluidic arrays
Author(s): Sheldon M. Kugelmass; Chao Lin; Sheila H. DeWitt
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Paper Abstract

3D microfluidic arrays, containing a network of channels and vias, have been fabricated in Pyrex, and silicon, using a range of techniques including chemical etching, deep reactive ion etching, laser micromachining and anodic bonding. Fluid is distributed along the layers of the structure through this series of lateral channels and passes from layer to layer through via holes. Vias on the order of 50 micrometers in diameter act as valves or `capillary breaks'; in which surface tension forces prevent the continued flow of fluid. An increase in the pressure head in the line causes the capillary break to yield, switching the valve, and allowing fluid to flow to the next layer. Circuit network models were applied to determine device parameters to balance pressure losses and allow uniform distribution to 12 branches from a single feed line more than 30 mm in length. These arrays have been employed in a 10 X 10 array of microchannels and microreactors to synthesize a library of 100 unique organic compounds in a 4-step solid phase synthesis protocol. All of the products generated had product purities < 70% (HPLC Area%).

Paper Details

Date Published: 19 August 1999
PDF: 7 pages
Proc. SPIE 3877, Microfluidic Devices and Systems II, (19 August 1999); doi: 10.1117/12.359325
Show Author Affiliations
Sheldon M. Kugelmass, Orchid Biocomputer Inc. (United States)
Chao Lin, Orchid Biocomputer Inc. (United States)
Sheila H. DeWitt, Orchid Biocomputer Inc. (United States)


Published in SPIE Proceedings Vol. 3877:
Microfluidic Devices and Systems II
Chong Hyuk Ahn; A. Bruno Frazier, Editor(s)

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