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Proceedings Paper

Measurement scattering of light from optical surfaces (DALIS)
Author(s): G. Gomez-Rosas; Daniel Malacara-Hernandez; Haiming Wang
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Paper Abstract

A new and simple method, the dynamic angle limited integrated scattering measurement technique is developed to examine light scattered from clean optically smooth reflective surfaces with random roughness. We present three new systems which have several advantages over the conventional angle resolved scattering (ARS) system. As scattered light is collected in a given solid angle, the measurement system does not require a detection unit with an extremely dynamic range. Unlike in the common ARS measurement system, in this method a linear movement is adopted to scan scattered light. This technique can be applied to the in-workshop inspection of the optical polishing process.

Paper Details

Date Published: 6 July 1999
PDF: 5 pages
Proc. SPIE 3572, 3rd Iberoamerican Optics Meeting and 6th Latin American Meeting on Optics, Lasers, and Their Applications, (6 July 1999); doi: 10.1117/12.358419
Show Author Affiliations
G. Gomez-Rosas, Ctr. de Investigaciones en Optica, A.C. (Mexico)
Daniel Malacara-Hernandez, Ctr. de Investigaciones en Optica, A.C. (Mexico)
Haiming Wang, KLA-Tencor Corp. (United States)


Published in SPIE Proceedings Vol. 3572:
3rd Iberoamerican Optics Meeting and 6th Latin American Meeting on Optics, Lasers, and Their Applications

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