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Proceedings Paper

MEMS-based single-cell penetration force sensor
Author(s): Eniko T. Enikov; Bradley J. Nelson
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Paper Abstract

The rapid development of reproductive biology has created a need for quantifying penetration forces during artificial fertilization. It has been demonstrated that the success of such procedures heavily depends on the mechanics of penetration of the egg's zona and membrane. To quantify the forces during intracytoplasmic injections we have developed a MEMS based force sensor. Deep RIE and fusion bonding are used to fabricate a variable capacitance type sensor. It is designed to measure the penetration force during intracytoplasmic injection of egg cells as well as other applications in the 1 - 500 micrometers N force range. The sensor measures tri-axial forces using a system of flexible beams subjected to bending and torsion. The process is relatively simple and allows for easy modification of the force range. A penetration pipette tip is attached to the sensor body using a low temperature bonding technique. Calibration, sensitivity and initial experimental data is provided.

Paper Details

Date Published: 18 August 1999
PDF: 7 pages
Proc. SPIE 3834, Microrobotics and Microassembly, (18 August 1999); doi: 10.1117/12.357829
Show Author Affiliations
Eniko T. Enikov, Univ. of Minnesota/Twin Cities (United States)
Bradley J. Nelson, Univ. of Minnesota/Twin Cities (United States)

Published in SPIE Proceedings Vol. 3834:
Microrobotics and Microassembly
Bradley J. Nelson; Jean-Marc Breguet, Editor(s)

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