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Proceedings Paper

Automatic control system of a microrobot-based microassembly station using computer vision
Author(s): Sergej Fatikow; Axel Buerkle; Joerg Seyfried
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Paper Abstract

The assembly of complex microsystems consisting of several single components (i.e. hybrid microsystems) is a difficult task that is seen to be a real challenge for the robotics research community. It is necessary to conceive flexible, highly precise and fast microassembly devices and methods. In this paper, the development of a microrobot-based microassembly station is presented. Mobile piezoelectric microrobots with dimensions of some cm3 and with at least 5 DOF can perform various manipulations either under a light microscope or within the vacuum chamber of a scanning electron microscope. The control system of the microassembly station is described. The main attention is given to a vision-based sensor system for automatic robot control and a re-configurable parallel computer array enabling the station to work in real-time.

Paper Details

Date Published: 18 August 1999
PDF: 12 pages
Proc. SPIE 3834, Microrobotics and Microassembly, (18 August 1999); doi: 10.1117/12.357820
Show Author Affiliations
Sergej Fatikow, Univ. of Karlsruhe (Germany)
Axel Buerkle, Univ. of Karlsruhe (Germany)
Joerg Seyfried, Univ. of Karlsruhe (Germany)

Published in SPIE Proceedings Vol. 3834:
Microrobotics and Microassembly
Bradley J. Nelson; Jean-Marc Breguet, Editor(s)

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