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Proceedings Paper

Parallel assembly of high-aspect-ratio microstructures
Author(s): John T. Feddema; Todd R. Christenson
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Paper Abstract

In this paper, a prototype robotic workcell for the parallel assembly of LIGA components is described. A Cartesian robot is used to press 386 and 485 micron diameter pins into a LIGA substrate and then place a 3-inch diameter wafer with LIGA gears onto the pins. Upward and downward looking microscopes are used to locate holes in the LIGA substrate, pins to be pressed in the holes, and gears to be placed on the pins. This vision system can locate parts within 3 microns, while the Cartesian manipulator can place the parts within 0.4 microns.

Paper Details

Date Published: 18 August 1999
PDF: 12 pages
Proc. SPIE 3834, Microrobotics and Microassembly, (18 August 1999); doi: 10.1117/12.357819
Show Author Affiliations
John T. Feddema, Sandia National Labs. (United States)
Todd R. Christenson, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 3834:
Microrobotics and Microassembly
Bradley J. Nelson; Jean-Marc Breguet, Editor(s)

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