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Proceedings Paper

Apochromatic reflection optics used in UV interferometry
Author(s): Andreas Pfoertner; Wolfgang Emer; Johannes Schwider
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Paper Abstract

An interferometer for VUV wavelengths was realized in order to improve the resolution and the sensitivity of optical metrology. To be able to work at wavelengths 157 nm up to 900 nm an apochromatic design was chosen using reflective optics. For the examination of the influence of the wavelength binary gratings with different periods, aspect ratios and depths, have been selected as test structures. The benefits and also the technological problems which come along with the use of VUV wavelengths are discussed. The design of this interferometer and measuring results with different wavelengths are presented.

Paper Details

Date Published: 17 August 1999
PDF: 9 pages
Proc. SPIE 3745, Interferometry '99: Applications, (17 August 1999); doi: 10.1117/12.357805
Show Author Affiliations
Andreas Pfoertner, Univ. Erlangen-Nuernberg (Germany)
Wolfgang Emer, Univ. Erlangen-Nuernberg (Germany)
Johannes Schwider, Univ. Erlangen-Nuernberg (Germany)


Published in SPIE Proceedings Vol. 3745:
Interferometry '99: Applications
Werner P. O. Jueptner; Krzysztof Patorski, Editor(s)

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