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Proceedings Paper

Spectral characteristics of filters and semiconductor devices for wavelength metrology
Author(s): Frank Bitte; Tilo Pfeifer
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Paper Abstract

Wavelength measurements with Michelson interferometers have major disadvantages of high costs and low measurement rates. The paper shows two alternative methods for wavelength measurement of monochromatic light that are based on spectral characteristics of optical components. The methods are illustrated for interference filters and double photodiodes.

Paper Details

Date Published: 13 August 1999
PDF: 6 pages
Proc. SPIE 3744, Interferometry '99: Techniques and Technologies, (13 August 1999); doi: 10.1117/12.357741
Show Author Affiliations
Frank Bitte, Fraunhofer Institute of Production Technology (Germany)
Tilo Pfeifer, Fraunhofer Institute of Production Technology (Germany)


Published in SPIE Proceedings Vol. 3744:
Interferometry '99: Techniques and Technologies
Malgorzata Kujawinska; Mitsuo Takeda, Editor(s)

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