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Proceedings Paper

Fringe analysis in phase-shifting interferometers suppressing spatially nonuniform phase modulation, beam amplitude modulation, and nonlinearity of modulator
Author(s): Kenichi Hibino
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Paper Abstract

In a phase-shifting interferometer, spatial non-uniformity of the phase modulation happens in such a case where an aspherical mirror is compared to the corresponding aspherical standard surface which is translated along the optical axis by a piezo electric transducer. The amount of phase shift is different from position to position across the observing aperture depending on the direction cosine of the testing surface. In another case, when the reference optical flat is translated by two or more piezo-electric transducers, we cannot ensure that the reference surface moves strictly parallel to the optical axis. When these transducers have different sensitivities, the phase modulation is not longer spatially uniform and varies across the observing aperture.

Paper Details

Date Published: 13 August 1999
PDF: 8 pages
Proc. SPIE 3744, Interferometry '99: Techniques and Technologies, (13 August 1999); doi: 10.1117/12.357721
Show Author Affiliations
Kenichi Hibino, Mechanical Engineering Lab. (Japan)


Published in SPIE Proceedings Vol. 3744:
Interferometry '99: Techniques and Technologies

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