Share Email Print
cover

Proceedings Paper

Real-time shape measurement by integrated phase-shifting method
Author(s): Yoshiharu Morimoto; Motoharu Fujigaki; Hiroki Toda
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Phase distribution analysis of deformed gratings in moire method and grating projection method provides accurate shape of specimen. We previously proposed the phase-shifting method using correlation with a rectangular function. The phase analysis uses many images during phase shifting of the projected grating. In this paper, we propose a new real-time phase analysis method, that is, the integrated phase- shifting method using four images of phase-shifted grating patterns with a rectangular brightness distribution. The theory and some applications to shape measurement are shown.

Paper Details

Date Published: 13 August 1999
PDF: 8 pages
Proc. SPIE 3744, Interferometry '99: Techniques and Technologies, (13 August 1999); doi: 10.1117/12.357702
Show Author Affiliations
Yoshiharu Morimoto, Wakayama Univ. (Japan)
Motoharu Fujigaki, Wakayama Univ. (Japan)
Hiroki Toda, Wakayama Univ. (Japan)


Published in SPIE Proceedings Vol. 3744:
Interferometry '99: Techniques and Technologies
Malgorzata Kujawinska; Mitsuo Takeda, Editor(s)

© SPIE. Terms of Use
Back to Top