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Proceedings Paper

Real-time shape measurement by integrated phase-shifting method
Author(s): Yoshiharu Morimoto; Motoharu Fujigaki; Hiroki Toda
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Paper Abstract

Phase distribution analysis of deformed gratings in moire method and grating projection method provides accurate shape of specimen. We previously proposed the phase-shifting method using correlation with a rectangular function. The phase analysis uses many images during phase shifting of the projected grating. In this paper, we propose a new real-time phase analysis method, that is, the integrated phase- shifting method using four images of phase-shifted grating patterns with a rectangular brightness distribution. The theory and some applications to shape measurement are shown.

Paper Details

Date Published: 13 August 1999
PDF: 8 pages
Proc. SPIE 3744, Interferometry '99: Techniques and Technologies, (13 August 1999); doi: 10.1117/12.357702
Show Author Affiliations
Yoshiharu Morimoto, Wakayama Univ. (Japan)
Motoharu Fujigaki, Wakayama Univ. (Japan)
Hiroki Toda, Wakayama Univ. (Japan)

Published in SPIE Proceedings Vol. 3744:
Interferometry '99: Techniques and Technologies
Malgorzata Kujawinska; Mitsuo Takeda, Editor(s)

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