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Proceedings Paper

Reactor and process modeling in optoelectronic device fabrication
Author(s): Meyya Meyyappan; Deepak Bose
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Paper Details

Date Published: 6 August 1999
PDF: 9 pages
Proc. SPIE 3625, Physics and Simulation of Optoelectronic Devices VII, (6 August 1999); doi: 10.1117/12.356905
Show Author Affiliations
Meyya Meyyappan, NASA Ames Research Ctr. (United States)
Deepak Bose, ELORET Thermosciences Institute (United States)

Published in SPIE Proceedings Vol. 3625:
Physics and Simulation of Optoelectronic Devices VII
Peter Blood; Akira Ishibashi; Marek Osinski, Editor(s)

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