Share Email Print
cover

Proceedings Paper

Reactor and process modeling in optoelectronic device fabrication
Author(s): Meyya Meyyappan; Deepak Bose
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Details

Date Published: 6 August 1999
PDF: 9 pages
Proc. SPIE 3625, Physics and Simulation of Optoelectronic Devices VII, (6 August 1999); doi: 10.1117/12.356905
Show Author Affiliations
Meyya Meyyappan, NASA Ames Research Ctr. (United States)
Deepak Bose, ELORET Thermosciences Institute (United States)


Published in SPIE Proceedings Vol. 3625:
Physics and Simulation of Optoelectronic Devices VII
Peter Blood; Akira Ishibashi; Marek Osinski, Editor(s)

© SPIE. Terms of Use
Back to Top