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Proceedings Paper

High-speed and high-resolution heterodyne interferometer using a three-mode laser
Author(s): Toshiyuki Yokoyama; Tsutomu Araki; Shuko Yokoyama; Norihito Suzuki
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Paper Abstract

In the measurement using conventional heterodyne interferometer, `high-speed' and `high-resolution' were methodologically contradictory problems. Previously, authors have solved this contradiction by using two conjugate beat signals. In this work, we realized highly sensitive measurement without speed limit of the target using a three- mode laser. The synthetic wavelength of (lambda) /2 generated by three-mode laser enabled to increase the measurement sensitivity twice. The three-mode laser also has an advantage of higher output power.

Paper Details

Date Published: 19 July 1999
PDF: 2 pages
Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); doi: 10.1117/12.355019
Show Author Affiliations
Toshiyuki Yokoyama, Osaka Univ. (Japan)
Tsutomu Araki, Osaka Univ. (Japan)
Shuko Yokoyama, Japan Micro-Optics Co. (Japan)
Norihito Suzuki, Osaka Electro Communication Univ. (Japan)


Published in SPIE Proceedings Vol. 3749:
18th Congress of the International Commission for Optics

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