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Proceedings Paper

Active micromirror: a new adaptive optical microcomponent
Author(s): Gilles Robert; A. Coville; L. Babadjian; Serge Spirkovitch
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Paper Abstract

The AMM is a new kind of micromachined deformable mirror. It is a silicon mirror which can be electrostatically actuated by electrodes located on each side of the mirror. In this article we describe the characteristics and the results of modelization and testing of our deformable micro mirror.

Paper Details

Date Published: 19 July 1999
PDF: 2 pages
Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); doi: 10.1117/12.354879
Show Author Affiliations
Gilles Robert, Ecole Superieure d'Ingenieurs en Electrotechnique et Electronique (France)
A. Coville, SFIM Industries (France)
L. Babadjian, Ecole Superieure d'Ingenieurs en Electrotechnique et Electronique (France)
Serge Spirkovitch, Ecole Superieure d'Ingenieurs en Electrotechnique et Electronique (France)


Published in SPIE Proceedings Vol. 3749:
18th Congress of the International Commission for Optics
Alexander J. Glass; Joseph W. Goodman; Milton Chang; Arthur H. Guenther; Toshimitsu Asakura, Editor(s)

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