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Proceedings Paper

Simultaneous calibration algorithm of phase-shifting based on FFT
Author(s): Wansong Li; Likun Su; Xianyu Su; Liqun Xiang
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Paper Abstract

In phase-measuring profilometry, the accuracy of the phase- shifting is very important. In this paper, a new simultaneous calibration algorithm of phase-shifting based on fast Fourier transform (FFT) is presented. The current phase shifting is calculated with the help of the information of an additional fringe pattern and a FFT modulation mask. With this algorithm, we can accurately control the moving of the project grating simultaneous, the accuracy and the automation of the measuring system are improved greatly.

Paper Details

Date Published: 19 July 1999
PDF: 2 pages
Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); doi: 10.1117/12.354876
Show Author Affiliations
Wansong Li, Sichuan Univ. (China)
Likun Su, Sichuan Univ. (China)
Xianyu Su, Sichuan Univ. (China)
Liqun Xiang, Sichuan Univ. (China)


Published in SPIE Proceedings Vol. 3749:
18th Congress of the International Commission for Optics
Alexander J. Glass; Joseph W. Goodman; Milton Chang; Arthur H. Guenther; Toshimitsu Asakura, Editor(s)

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