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Proceedings Paper

Integrated micromachined scanning display systems
Author(s): Paul M. Hagelin; Uma Krishnamoorthy; Robert A. Conant; Richard S. Muller; Kam Y. Lau; Olav Solgaard
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Paper Abstract

We describe a raster-scanning display system comprised of two tilt-up micromachined polysilicon mirrors that rotate about orthogonal axes. We have demonstrated a resolution of 102 X 119 pixels. The optical efficiency of our two- mirror micro-optical raster-scanning system is comparable to that of micromachined display systems developed by Texas Instruments and Silicon Light Machines. Ease of integration with on-chip light sources and lenses has the potential to reduce packaging size, complexity and cost of the display system and makes it well suited for head-mounted display applications.

Paper Details

Date Published: 19 July 1999
PDF: 2 pages
Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); doi: 10.1117/12.354841
Show Author Affiliations
Paul M. Hagelin, Univ. of California/Davis (United States)
Uma Krishnamoorthy, Univ. of California/Davis (United States)
Robert A. Conant, Univ. of California/Berkeley (United States)
Richard S. Muller, Univ. of California/Berkeley (United States)
Kam Y. Lau, Univ. of California/Berkeley (United States)
Olav Solgaard, Univ. of California/Davis (United States)


Published in SPIE Proceedings Vol. 3749:
18th Congress of the International Commission for Optics
Alexander J. Glass; Joseph W. Goodman; Milton Chang; Arthur H. Guenther; Toshimitsu Asakura, Editor(s)

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