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Proceedings Paper

Birefringent scatterplate phase-shifting interferometer
Author(s): Michael B. North Morris; Jay Van Delden; James C. Wyant
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Paper Abstract

A new phase shifting scatterplate interferometer is realized by exploiting the polarization characteristics of a birefringent scatterplate. The advantages of this design are that it does not require any optical components to be placed near the surface under test and, the hot spot and background intensity, which are inherent to scatterplate interferometers, are eliminated. The theory of the interferometer is presented.

Paper Details

Date Published: 19 July 1999
PDF: 2 pages
Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); doi: 10.1117/12.354821
Show Author Affiliations
Michael B. North Morris, Optical Sciences Ctr./Univ. of Arizona (United States)
Jay Van Delden, Optical Sciences Ctr./Univ. of Arizona (United States)
James C. Wyant, Optical Sciences Ctr./Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 3749:
18th Congress of the International Commission for Optics
Alexander J. Glass; Joseph W. Goodman; Milton Chang; Arthur H. Guenther; Toshimitsu Asakura, Editor(s)

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