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Proceedings Paper

Linear thermopile array for fast searching
Author(s): Nami Shibata; Masaki Hirota; Fuminori Sato; Hidemi Yasui; Shinichi Morita
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Paper Abstract

A linear thermopile array with characteristics of high responsivity, fast response and low cost has been developed for use in searching for and detecting heat-radiating objects. The thermopile is fabricated by means of a silicon surface micromachining, compatible Si CMOS process and a lift-off technique, which result in a precisely patterned Au black absorption layer. The dynamic signal-to-noise ratio is proposed as a new figure of merit for evaluating thermal IR sensors and is used to design the thermopile configuration so as to obtain optimum responsivity and thermal time constant. The newly fabricated thermopile array is composed of a zigzag arrangement of two rows of seven IR sensing elements and achieves responsivity of 230 V/W and a thermal time constant of 0.5 msec. The array, incorporating an optical system with a 30-mm-diameter of 80 m for a target with a background temperature difference of 25 degrees C.

Paper Details

Date Published: 26 July 1999
PDF: 10 pages
Proc. SPIE 3698, Infrared Technology and Applications XXV, (26 July 1999); doi: 10.1117/12.354556
Show Author Affiliations
Nami Shibata, Nissan Motor Co., Ltd. (Japan)
Masaki Hirota, Nissan Motor Co., Ltd. (Japan)
Fuminori Sato, Nissan Motor Co., Ltd. (Japan)
Hidemi Yasui, Nissan Motor Co., Ltd. (Japan)
Shinichi Morita, Nissan Motor Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 3698:
Infrared Technology and Applications XXV
Bjorn F. Andresen; Marija Strojnik, Editor(s)

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