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Proceedings Paper

Thermal infrared microscopy (TIM) with sub-10-um spatial resolution
Author(s): Thomas Hierl; Oliver Schreer; Juergen Zettner; Werner Gross; Max J. Schulz
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Paper Abstract

We present thermal IR microscopy systems suitable for a spatial resolution below 10micrometers . This resolution close to the fundamental limit is achieved using high resolution FPA - IR cameras, a high speed microscopy optic and acquisition of multiple frames which are shuffled by software in real time. Some fundamental consideration to gain insight into the task of thermal microscopy are briefed. The minimum resolvable temperature and the noise equivalent temperature difference both are a function of thermal diffusivity i.e. material properties, integration time and optics. The basic relationships are explained using numerical modeling. Based on our considerations and knowledge we developed different TIM-Systems, each having specific advantages and are therefore more or less suitable for certain applications. A high spatial temperature or thermal resolution is necessary for different materials under investigation. Examples demonstrate the unique capabilities of the innovative systems and give a glance of the various technical applications of TIM systems.

Paper Details

Date Published: 26 July 1999
PDF: 7 pages
Proc. SPIE 3698, Infrared Technology and Applications XXV, (26 July 1999); doi: 10.1117/12.354546
Show Author Affiliations
Thomas Hierl, Thermosensorik GmbH (Germany)
Oliver Schreer, Thermosensorik GmbH (Germany)
Juergen Zettner, Thermosensorik GmbH (Germany)
Werner Gross, Bayerisches Zentrum fuer Angewandte Energieforschung e.V. (Germany)
Max J. Schulz, Bayerisches Zentrum fuer Angewandte Energieforschung e.V. and Univ. Erlangen-Nuernberg and (Germany)


Published in SPIE Proceedings Vol. 3698:
Infrared Technology and Applications XXV
Bjorn F. Andresen; Marija Strojnik, Editor(s)

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