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Proceedings Paper

Application of the hybrid finite-difference time-domain method to modeling curved surfaces in three-dimensional lithography simulation
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Paper Abstract

The original hybrid-FDTD method developed by Wu and Itoh is extended to handle lossy material with positive or negative dielectric constants. Numerical results are given to compare the hybrid-FDTD method and standard FDTD. The result show that the hybrid-FDTD method is much more accurate than standard FDTD when the same mesh spacing is used in both methods. In the case of lossy materials with negative dielectric constants, the hybrid-FDTD method is found to be found to be much more accurate than standard FDTD even when a mesh spacing four times finer is used in the latter method. These results highlight the importance of modeling curved surfaces accurately in DUV lithography simulation using the hybrid-FDTD method.

Paper Details

Date Published: 26 July 1999
PDF: 11 pages
Proc. SPIE 3679, Optical Microlithography XII, (26 July 1999); doi: 10.1117/12.354316
Show Author Affiliations
Michael S. Yeung, Boston Univ. (United States)
Eytan Barouch, Boston Univ. (United States)


Published in SPIE Proceedings Vol. 3679:
Optical Microlithography XII
Luc Van den Hove, Editor(s)

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