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Proceedings Paper

LIGA-like process for high-aspect-ratio PZT microstructures
Author(s): Gil S. Lee; Yoonyoung Jin; Sangwon Park; Pratul K. Ajmera; Chantal G. Khan Malek; Jin T. Wang; F. Tang
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Paper Abstract

Processing technique for fabrication of high-aspect ratio structures in PZT is developed in this work using deep X-ray exposures at the CAMD synchrotron storage ring. Arrays of posts were successfully fabricated in PMMA mold as thick as 2700 micrometers and with aspect ratio as high as 15. This LIGA- like technique allows fabrication of structures of shapes and sizes not possible with standard techniques using bulk PZT material or by the existing thin film techniques for PZT deposition. The process shows promise for various applications including high resolution medical imaging and optical projection.

Paper Details

Date Published: 20 July 1999
PDF: 6 pages
Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); doi: 10.1117/12.354296
Show Author Affiliations
Gil S. Lee, Louisiana State Univ. (United States)
Yoonyoung Jin, Louisiana State Univ. (United States)
Sangwon Park, Louisiana State Univ. (United States)
Pratul K. Ajmera, Louisiana State Univ. (United States)
Chantal G. Khan Malek, Louisiana State Univ. (United States)
Jin T. Wang, Southern Univ. and A & M College (United States)
F. Tang, Southern Univ. and A & M College (United States)

Published in SPIE Proceedings Vol. 3673:
Smart Structures and Materials 1999: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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