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Proceedings Paper

Noise analysis and a comparative study of noise in MEMS and MOEMS
Author(s): Ananth Selvarajan; S. K. Anand
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Paper Abstract

In recent years Micro Electro mechanical systems (MEMS) and micro opto electro mechanical systems (MOEMS) have grown in importance, especially in smart structure applications. In this paper a theoretical comparative study is made analyzing three different types of micro pressure sensors. MEMS type pressure sensors of the piezo-resistive and capacitive type are considered along with MOEM pressure sensor of the Fabry- Perot interferometric type. It is found that piezo resistive and capacitive pressure sensors in the micro form attain improved noise performance as compared to their bulk counterparts. The opto-mechanical sensors shows better noise performance than the capacitive sensor, when the limiting noise is due to Brownian motion.

Paper Details

Date Published: 20 July 1999
PDF: 8 pages
Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); doi: 10.1117/12.354293
Show Author Affiliations
Ananth Selvarajan, Indian Institute of Science/Bangalore (India)
S. K. Anand, Indian Institute of Science/Bangalore (India)

Published in SPIE Proceedings Vol. 3673:
Smart Structures and Materials 1999: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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