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Proceedings Paper

Conducting polymer FET devices for vapor sensing
Author(s): James A. Covington; Julian W. Gardner; John V. Hatfield
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Paper Abstract

Conducting polymer films are employed as the active material in both resistive and acoustic waves gas sensors. Here we describe the use of an electroactive conducting polymer as the gate material in a gas-sensitive MOSFET sensor run at ambient temperature and compare it to a conventional catalytic metal gate MOSFET run at 180 degree(s)C.

Paper Details

Date Published: 20 July 1999
PDF: 12 pages
Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); doi: 10.1117/12.354282
Show Author Affiliations
James A. Covington, Univ. of Warwick (United Kingdom)
Julian W. Gardner, Univ. of Warwick (United Kingdom)
John V. Hatfield, Univ. of Manchester Institute of Science and Technology (United Kingdom)


Published in SPIE Proceedings Vol. 3673:
Smart Structures and Materials 1999: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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