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Proceedings Paper

On-chip circuitry for a CMOS parallel scanning AFM
Author(s): Christoph Hagleitner; Dirk Lange; Terunobu Akiyama; A. Tonin; Rolf Vogt; Henry Baltes
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Paper Abstract

We present on-chip signal conditioning circuitry for the first parallel scanning Atomic Force Microscope sensors fabricated in industrial CMOS technology. The system combines, on a single chip, (1) two cantilevers for parallel scanning, (2) thermal actuators for independent deflection of the two cantilevers, (3) sensors to measure the deflection and (4) offset compensation and signal conditioning circuitry. It was fabricated using the 2.0 micrometers CMOS process of Austria Mikro Systeme and CMOS compatible post-processing micromachining. Scanning images were successfully acquired in contact and dynamic mode. The resolution of the recorded tapping mode images is better than 20 angstroms.

Paper Details

Date Published: 20 July 1999
PDF: 9 pages
Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); doi: 10.1117/12.354275
Show Author Affiliations
Christoph Hagleitner, ETH Zurich (Switzerland)
Dirk Lange, ETH Zurich (Switzerland)
Terunobu Akiyama, Univ. of Neuchatel (Switzerland)
A. Tonin, Univ. of Basel (Switzerland)
Rolf Vogt, ETH Zurich (Switzerland)
Henry Baltes, ETH Zurich (Switzerland)


Published in SPIE Proceedings Vol. 3673:
Smart Structures and Materials 1999: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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