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Proceedings Paper

Micro-electro-mechanical actuator with extended range and enhanced force: fabrication, test, and application as a mechanical scanner
Author(s): Stephen M. Bobbio; Stephen W. Smith; Jason M. Zara; Scott H. Goodwin-Johansson; John A. Hudak; Thomas D. DuBois; Harry J. Leamy; Jennifer Godwin; M. Pennington
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Paper Abstract

A miniature ultrasound scanner has been constructed using a MEMS actuator called an Integrated Force Array. A second type of actuator called a Spiral Wound Transducer (SWT) is under development and shows significant promise for this application. Both the scanner and SWT will be discussed.

Paper Details

Date Published: 20 July 1999
PDF: 9 pages
Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); doi: 10.1117/12.354271
Show Author Affiliations
Stephen M. Bobbio, Univ. of North Carolina/Charlotte (United States)
Stephen W. Smith, Duke Univ. (United States)
Jason M. Zara, Duke Univ. (United States)
Scott H. Goodwin-Johansson, Microelectronic Ctr. of North Carolina (United States)
John A. Hudak, Univ. of North Carolina/Charlotte (United States)
Thomas D. DuBois, Univ. of North Carolina/Charlotte (United States)
Harry J. Leamy, Univ. of North Carolina/Charlotte (United States)
Jennifer Godwin, Univ. of North Carolina/Charlotte (United States)
M. Pennington, Integrated Electronic Innovations, Inc. (United States)


Published in SPIE Proceedings Vol. 3673:
Smart Structures and Materials 1999: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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