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Proceedings Paper

MEMS-IDT-based accelerometers and gyroscopes
Author(s): Vijay K. Varadan; Pascal Xavier; Vasundara V. Varadan; D. Suh; Massood Zandi Atashbar; K. A. Jose
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Paper Abstract

The integration of MEMS, IDTs (Interdigital Transducers) and required microelectronics and conformal antenna to realize a programmable accelerometers and gyroscopes suitable for inertial navigation is presented in this paper. This unique combination of technologies results in novel conformal sensors that can be remotely sensed by a RF system with the advantage of no power requirements at the sensor site. The sensors presented are simple in construction and easy to manufacture with existing silicon micromachining and stereo lithography techniques. Programmable sensors can be achieved with splitfinger interdigital transducers (IDTs) as reflecting structures. If IDTs are short-circuited or capacitively loaded, the wave propagates without any reflection whereas in an open circuit configuration, the IDTs reflect the incoming SAW signal. The programmable accelerometers and gyroscopes can thus be achieved by using an external circuitry on a semiconductor chip using hybrid technology.

Paper Details

Date Published: 20 July 1999
PDF: 8 pages
Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); doi: 10.1117/12.354267
Show Author Affiliations
Vijay K. Varadan, The Pennsylvania State Univ. (United States)
Pascal Xavier, The Pennsylvania State Univ. and DSO National Labs. (Singapore)
Vasundara V. Varadan, The Pennsylvania State Univ. (United States)
D. Suh, The Pennsylvania State Univ. (United States)
Massood Zandi Atashbar, The Pennsylvania State Univ. (United States)
K. A. Jose, The Pennsylvania State Univ. (United States)


Published in SPIE Proceedings Vol. 3673:
Smart Structures and Materials 1999: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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