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Proceedings Paper

Laser-induced damage of optical coatings grown with surface chemical reaction
Author(s): Shin-ichi Zaitsu; Shinji Motokoshi; Takahisa Jitsuno; Tatsuhiko Yamanaka
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Paper Abstract

We prepared optical thin films grown with surface chemical reactions using TiCl4 and H2O for TiO2, Al(CH3)3 and H2O2 for Al2O3 as reactants. The uniformity of thickness distribution was good over 240 mm in diameter. The film thickness could be preciously controlled only by the number of cycles. Two-layer TiO2/Al2O3 anti-reflection coating with less than 0.2 percent reflection loss at 532nm was fabricated. Laser induced threshold strongly depend on the growth temperature and the introduced gas pressure. They increasing with decreasing the growth temperature and with increasing the introduced gas pressure.

Paper Details

Date Published: 23 July 1999
PDF: 8 pages
Proc. SPIE 3492, Third International Conference on Solid State Lasers for Application to Inertial Confinement Fusion, (23 July 1999); doi: 10.1117/12.354234
Show Author Affiliations
Shin-ichi Zaitsu, Osaka Univ. (Japan)
Shinji Motokoshi, Institute for Laser Technology (Japan)
Takahisa Jitsuno, Osaka Univ. (Japan)
Tatsuhiko Yamanaka, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 3492:
Third International Conference on Solid State Lasers for Application to Inertial Confinement Fusion
W. Howard Lowdermilk, Editor(s)

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