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Proceedings Paper

Comparison of optical and nonoptical methods for measuring surface roughness
Author(s): Ivan Ohlidal; Miloslav Ohlidal; Daniel Franta; Miroslav Tykal
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Paper Abstract

The values of the basic characteristics of surface roughness measured by means of optical and non-optical methods often differ mutually. So far a systematic comparison of the results obtained by those methods has not been done. The results we have achieved comparing optical and non-optical methods of the surface roughness measurement for selected samples of rough surfaces and for selected methods are presented.

Paper Details

Date Published: 14 July 1999
PDF: 12 pages
Proc. SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, (14 July 1999); doi: 10.1117/12.353100
Show Author Affiliations
Ivan Ohlidal, Masaryk Univ./Brno (Czech Republic)
Miloslav Ohlidal, Technical Univ./Brno (Czech Republic)
Daniel Franta, Masaryk Univ./Brno (Czech Republic)
Miroslav Tykal, Military Academy/Brno (Czech Republic)


Published in SPIE Proceedings Vol. 3820:
11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics

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