Share Email Print
cover

Proceedings Paper

Laser-induced writing of electrically conductive structures in the surface of AIN
Author(s): Beate Stolz; Ernst-Wolfgang Kreutz; Reinhart Poprawe
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

A laser-assisted process that enables the direct production of electrically conductive structures in the surface of aluminium nitride (AlN)-substrates is presented. The modification of the surface conductivity of AlN is performed by using pulsed excimer laser radiation. The process is systemically examined concerning its dependence on the processing variables. In order to characterize the modification the laser-treated specimens are analyzed with respect to electrical conductivity, chemical composition including factor analysis, X-ray-photoelectron-spectroscopy and electron beam microprobe analysis, structure and morphology.

Paper Details

Date Published: 12 July 1999
PDF: 12 pages
Proc. SPIE 3675, Smart Structures and Materials 1999: Smart Materials Technologies, (12 July 1999); doi: 10.1117/12.352793
Show Author Affiliations
Beate Stolz, Technical Univ. Aachen (Germany)
Ernst-Wolfgang Kreutz, Fraunhofer Institut fuer Lasertechnik (Germany)
Reinhart Poprawe, Technical Univ. Aachen and Fraunhofer Institut fuer Lasertechnik (Germany)


Published in SPIE Proceedings Vol. 3675:
Smart Structures and Materials 1999: Smart Materials Technologies
Manfred R. Wuttig, Editor(s)

© SPIE. Terms of Use
Back to Top