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Proceedings Paper

Formation of ultrahard metal oxide nanocluster coatings at room temperature by electrostatic self-assembly
Author(s): Aprillya Rosidian; Yanjing Liu; Richard O. Claus
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Paper Abstract

Different structures of multilayer hard coating thin-films have been fabricated on single crystal silicon and quartz substrates at room temperature by electrostatic self- assembly (ESA) method. This process involves the alternate dipping of oppositely charged polyelectrolytes. The ESA films have shown the formation of highly ordered and homogeneous structures with reduced voids. UV/VIs spectroscopy and ellipsometry were used to observe the ESA deposition process. The hardness and Young's modulus of the films were measured using nanoindentation technique.

Paper Details

Date Published: 12 July 1999
PDF: 7 pages
Proc. SPIE 3675, Smart Structures and Materials 1999: Smart Materials Technologies, (12 July 1999); doi: 10.1117/12.352784
Show Author Affiliations
Aprillya Rosidian, Virginia Polytechnic Institute and State Univ. (United States)
Yanjing Liu, Virginia Polytechnic Institute and State Univ. (United States)
Richard O. Claus, Virginia Polytechnic Institute and State Univ. (United States)


Published in SPIE Proceedings Vol. 3675:
Smart Structures and Materials 1999: Smart Materials Technologies
Manfred R. Wuttig, Editor(s)

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