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Proceedings Paper

Spectroscopic energy characterization of laser-induced titanium plume
Author(s): Schubert S. Chu; Mengqi Ye; Constantine P. Grigoropoulos
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Paper Abstract

A titanium target was ablated by a KrF excimer laser with fluences varying from 4 to 8 J/cm2 in an argon filled environment with pressures ranging from vacuum to 1 torr. The effects of laser fluence and background gas pressure on the kinetic energies of the ablated species were investigated by temporally and spatially resolved emission spectroscopy. The maximum surface temperatures were calculated by a 1D conduction mode. Experimentally obtained surface temperatures from the kinetic energy of the ejected plume were one order of magnitude higher than the calculated temperatures. This discrepancy is most likely due to the absorption of laser energy by the plasma that is formed early in the pulse. Temporally resolved imaging with 10 ns gate width was also employed to reveal the evolution of the ablated plume against the background gas. Separation of slower and faster components were observed for exposures above 50 mTorr, and angular concentration of titanium in the plume was determined.

Paper Details

Date Published: 15 July 1999
PDF: 7 pages
Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); doi: 10.1117/12.352720
Show Author Affiliations
Schubert S. Chu, Univ. of California/Berkeley (United States)
Mengqi Ye, Univ. of California/Berkeley (United States)
Constantine P. Grigoropoulos, Univ. of California/Berkeley (United States)


Published in SPIE Proceedings Vol. 3618:
Laser Applications in Microelectronic and Optoelectronic Manufacturing IV
Jan J. Dubowski; Henry Helvajian; Ernst-Wolfgang Kreutz; Koji Sugioka, Editor(s)

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