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Proceedings Paper

Reliability and lifetime of UV excilamps pumped by glow, barrier, and capacitive discharges
Author(s): Victor F. Tarasenko; Evgenii B. Chernov; Mikhail V. Erofeev; Alexei N. Panchenko; Victor S. Skakun; Edward A. Sosnin
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Paper Abstract

In the recent years, great progress in development of spontaneous UV and VUV sources, radiating on the transitions of excimer and exciplex molecules has been achieved. However, practical use of sealed-off excilamps is limited by low lifetime of gas mixture. In this paper, stability of output parameters of the excilamps pumped by glow, barrier and capacitive discharges is studied and the mechanism of chlorine losses in low pressure halogen containing excilamps made of quartz is determined.

Paper Details

Date Published: 15 July 1999
PDF: 8 pages
Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); doi: 10.1117/12.352719
Show Author Affiliations
Victor F. Tarasenko, High-Current Electronics Institute (Russia)
Evgenii B. Chernov, Tomsk State Univ. (Russia)
Mikhail V. Erofeev, High-Current Electronics Institute (Russia)
Alexei N. Panchenko, High-Current Electronics Institute (Russia)
Victor S. Skakun, High-Current Electronics Institute (Russia)
Edward A. Sosnin, High-Current Electronics Institute (Russia)

Published in SPIE Proceedings Vol. 3618:
Laser Applications in Microelectronic and Optoelectronic Manufacturing IV
Jan J. Dubowski; Henry Helvajian; Ernst-Wolfgang Kreutz; Koji Sugioka, Editor(s)

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