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Proceedings Paper

Concurrent in-line inspection system for CO2 laser drilling machine
Author(s): Makoto Kato; Nobuhiro Araki; Kazuhide Isaji; Hidehiko Karasaki
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Paper Abstract

We describe the concurrent in-line inspection system, which controls the CO2 laser drilling machine for printed wiring boards. The performance of a CO2 laser drilling process was improved drastically by the introduction of this inspection system. The principle of this inspection systems is based on the relationship between the exposed bottom area of the inner layer copper foil in via hole and the intensity of the reflected laser beam. The end of drilling process is detectable by the saturation of the reflected laser beam intensity generate at the copper foil surface of the blind via hole. We have carried out the drilling process for glass-cored epoxy substrate and have observed that the productivity of the drilling process i increased by 30 percent due to this inspection system.

Paper Details

Date Published: 15 July 1999
PDF: 7 pages
Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); doi: 10.1117/12.352715
Show Author Affiliations
Makoto Kato, Matsushita Research Institute Tokyo, Inc. (Japan)
Nobuhiro Araki, Matsushita Research Institute Tokyo, Inc. (Japan)
Kazuhide Isaji, Matsushita Industrial Equipment Co., Ltd. (Japan)
Hidehiko Karasaki, Matsushita Industrial Equipment Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 3618:
Laser Applications in Microelectronic and Optoelectronic Manufacturing IV
Jan J. Dubowski; Henry Helvajian; Ernst-Wolfgang Kreutz; Koji Sugioka, Editor(s)

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