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Proceedings Paper

Micromachining of glass materials by laser-induced plasma-assisted ablation (LIPAA) using a conventional nanosecond laser
Author(s): Jie Zhang; Koji Sugioka; Katsumi Midorikawa
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Paper Abstract

We report precision micromachining of fused quartz and Pyrex glass by laser-induced plasma-assisted ablation (LIPAA) using a conventional nanosecond UV or visible laser. High- quality micrograting structures with periods of 1.06 and 20 micrometers using a phase mask and a mask projection technique, respectively were fabricated by LIPAA. The Fresnel zone pattern was also produced in fused quartz. The hole with the size of 700 micrometers in diameter was fast drilled in fused quartz and Pyrex glass. A possible ablation mechanism was discussed based on the dependence of ablation metal target and glass substrate.

Paper Details

Date Published: 15 July 1999
PDF: 7 pages
Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); doi: 10.1117/12.352699
Show Author Affiliations
Jie Zhang, RIKEN-Institute of Physical and Chemical Research (Japan)
Koji Sugioka, RIKEN-Institute of Physical and Chemical Research (Japan)
Katsumi Midorikawa, RIKEN-Institute of Physical and Chemical Research (Japan)


Published in SPIE Proceedings Vol. 3618:
Laser Applications in Microelectronic and Optoelectronic Manufacturing IV
Jan J. Dubowski; Henry Helvajian; Ernst-Wolfgang Kreutz; Koji Sugioka, Editor(s)

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