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Proceedings Paper

High-accuracy micromachining of ceramics by frequency-tripled Nd:YAG lasers
Author(s): Dirk Hellrung; Li-Ya Yeh; Frank Depiereux; Arnold Gillner; Reinhart Poprawe
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Paper Abstract

Ceramics like Si3N4, Al2O3 and ZrO2 and also diamonds can be hardly machined by conventional methods. Short pulse lasers, especially frequency-tripled, diode pumped Nd:YAG-lasers with a high beam quality offer the possibility to ablate these materials with high quality. With a spot size of about 10 micrometers , high fluences can be achieved, so that the materials are vaporized without or with only a small holes with diameters >= 5 micrometers and cutting of thin ceramic substrates. The edges are sharp and the face of the cut is very smooth. Furthermore it is possible to ablate three dimensional microstructures. Therefore the laser beam is scanned over the surface and the materials is ablated pulse beside optimized machining parameters the surface roughness can be reduced to R <EQ 0.1 micrometers . Due to the low ablation rate of around 0.05 (mu) g/pulse the ablation depth of a single slice can be controlled very precisely. Depending on the material and the machining parameters the depth is in the range of 1 to 10 micrometers .

Paper Details

Date Published: 15 July 1999
PDF: 9 pages
Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); doi: 10.1117/12.352697
Show Author Affiliations
Dirk Hellrung, Fraunhofer-Institut fuer Lasertechnik (Germany)
Li-Ya Yeh, Fraunhofer-Institut fuer Lasertechnik (Germany)
Frank Depiereux, Fraunhofer-Institut fuer Lasertechnik (Germany)
Arnold Gillner, Fraunhofer-Institut fuer Lasertechnik (Germany)
Reinhart Poprawe, Fraunhofer-Institut fuer Lasertechnik (Germany)

Published in SPIE Proceedings Vol. 3618:
Laser Applications in Microelectronic and Optoelectronic Manufacturing IV
Jan J. Dubowski; Henry Helvajian; Ernst-Wolfgang Kreutz; Koji Sugioka, Editor(s)

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