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Proceedings Paper

Laser surface cleaning of electronic materials
Author(s): Yongfeng Lu; Wen Dong Song; Y. Zhang; Yuan Wei Zheng
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Paper Abstract

Laser cleaning was demonstrated both theoretically and experimentally to be an effective cleaning techniques for removing particulate and thin film contaminants from electronic materials. Two types of laser cleaning techniques have been discussed, relying on pulsed laser of the surface without or with the presence of a thin liquid coating. For dry and steam laser cleaning, cleaning models were established for removal of particles from substrate surfaces without or with a thin liquid layer by taking adhesion forces and cleaning force into account. The models not only explain the influence of laser fluence on cleaning efficiency, but also predict the cleaning thresholds. The laser-induced removal of organic thin film contaminants is considered due to laser ablation of the contaminants. Applications of laser cleaning to clean magnetic sliders, magnetic media surfaces, IC mold and PCB will also be addressed.

Paper Details

Date Published: 15 July 1999
PDF: 12 pages
Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); doi: 10.1117/12.352690
Show Author Affiliations
Yongfeng Lu, National Univ. of Singapore (United States)
Wen Dong Song, National Univ. of Singapore (Singapore)
Y. Zhang, National Univ. of Singapore (Singapore)
Yuan Wei Zheng, National Univ. of Singapore (Singapore)


Published in SPIE Proceedings Vol. 3618:
Laser Applications in Microelectronic and Optoelectronic Manufacturing IV
Jan J. Dubowski; Henry Helvajian; Ernst-Wolfgang Kreutz; Koji Sugioka, Editor(s)

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