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Proceedings Paper

Excimer laser micromachining: a 15-year perspective
Author(s): Malcolm C. Gower
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Paper Abstract

Reports in 1982 of polymers ablated and etched by excimer laser radiation mark the founding of laser micromachining as a technology that in the intervening period has matured into a manufacturing process used by a diverse range of industries. This paper describes some of these industrial applications.

Paper Details

Date Published: 15 July 1999
PDF: 11 pages
Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); doi: 10.1117/12.352688
Show Author Affiliations
Malcolm C. Gower, Exitech, Ltd. (United Kingdom)


Published in SPIE Proceedings Vol. 3618:
Laser Applications in Microelectronic and Optoelectronic Manufacturing IV
Jan J. Dubowski; Henry Helvajian; Ernst-Wolfgang Kreutz; Koji Sugioka, Editor(s)

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