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Proceedings Paper

Time- and space-resolved imaging and numerical simulation of laser zone texturing of Ni-P disk substrates
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Paper Abstract

This work investigates the transient process of melting and microscale surface deformation upon pulsed Nd:YLF laser heating of Ni-P hard disk substrates. The laser pulse energy is in the range of 1.0 (mu) J to 5.0 (mu) J. The features produced by laser heating have a diameter of approximately 15 micrometers and height in the tens of nanometers range. A laser flash photography system is developed to visualize the transient topography development during the laser texturing process. The system has a nanosecond time resolution and sub-micron spatial resolution. A numerical analysis based on finite difference method is conducted to simulate the microscale energy transport and fluid glow. Comparison between the numerical and the experimental result helps to understand the physical mechanism of the process.

Paper Details

Date Published: 15 July 1999
PDF: 9 pages
Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); doi: 10.1117/12.352684
Show Author Affiliations
Shaochen Chen, Univ. of California/Berkeley (United States)
Mengqi Ye, Univ. of California/Berkeley (United States)
Constantine P. Grigoropoulos, Univ. of California/Berkeley (United States)

Published in SPIE Proceedings Vol. 3618:
Laser Applications in Microelectronic and Optoelectronic Manufacturing IV
Jan J. Dubowski; Henry Helvajian; Ernst-Wolfgang Kreutz; Koji Sugioka, Editor(s)

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