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Proceedings Paper

Overview of variable-angle spectroscopic ellipsometry (VASE): II. Advanced applications
Author(s): Blaine Johs; John A. Woollam; Craig M. Herzinger; James N. Hilfiker; Ron A. Synowicki; Corey L. Bungay
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Paper Abstract

A preceding companion paper provides a general introduction to Variable Angle Spectroscopic Ellipsometry (VASE), and also describes many typical applications of the technique. In this paper, more advanced VASE applications are discussed. These applications rely on recent advances in ellipsometric hardware, which allow extremely accurate ellipsometric data to be acquired over a broad spectral range, from the IR to VUV. This instrumentation can also quantitatively measure the optical response of nonisotropic samples. Advanced data analysis techniques are also presented.

Paper Details

Date Published: 19 July 1999
PDF: 30 pages
Proc. SPIE 10294, Optical Metrology: A Critical Review, 1029404 (19 July 1999); doi: 10.1117/12.351667
Show Author Affiliations
Blaine Johs, J.A. Woollam Co., Inc. (United States)
John A. Woollam, J.A. Woollam Co., Inc. (United States)
Craig M. Herzinger, J.A. Woollam Co., Inc. (United States)
James N. Hilfiker, J.A. Woollam Co., Inc. (United States)
Ron A. Synowicki, J.A. Woollam Co., Inc. (United States)
Corey L. Bungay, J.A. Woollam Co., Inc. (United States)


Published in SPIE Proceedings Vol. 10294:
Optical Metrology: A Critical Review
Ghanim A. Al-Jumaily, Editor(s)

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