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Proceedings Paper

Multitype surface and thin film characterization using light scattering, scanning force microscopy, and white light interferometry
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Paper Abstract

The characterization of surface and thin film morphologies and roughnesses significantly benefits from appropriately utilizing different measuring techniques. When suitably combining light scattering measurements, scanning force microscopy, and white fight interferometry, comprehensive characterization over a wide range of sample types and roughness scales can be accomplished A concise overview on the characterization techniques is given, followed by examples of combined measurements. The presented results include a variety of samples such as superpolished and microrough substrates, thin film coatings for applications from the visible to the deep ultraviolet region, and rough engineering surfaces.

Paper Details

Date Published: 19 July 1999
PDF: 19 pages
Proc. SPIE 10294, Optical Metrology: A Critical Review, 102940E (19 July 1999); doi: 10.1117/12.351662
Show Author Affiliations
Angela Duparre, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Gunther Notni, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)


Published in SPIE Proceedings Vol. 10294:
Optical Metrology: A Critical Review
Ghanim A. Al-Jumaily, Editor(s)

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