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Proceedings Paper

Overview of variable-angle spectroscopic ellipsometry (VASE): I. Basic theory and typical applications
Author(s): John A. Woollam; Blaine D. Johs; Craig M. Herzinger; James N. Hilfiker; Ron A. Synowicki; Corey L. Bungay
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Paper Abstract

Variable angle spectroscopic ellipsometry (VASE) is important for metrology in several industries, and is a powerful technique for research on new materials and processes. Sophisticated instrumentation and software for VASE data acquisition and analysis is available for the most demanding research applications, while simple to use software enables the use of VASE for routine measurements as well. This article gives a basic introduction to the theory of ellipsometry, references “classic” papers, and shows typical VASE applications. In the following companion paper, more advanced applications are discussed.

Paper Details

Date Published: 19 July 1999
PDF: 26 pages
Proc. SPIE 10294, Optical Metrology: A Critical Review, 1029402 (19 July 1999); doi: 10.1117/12.351660
Show Author Affiliations
John A. Woollam, J.A. Woollam Co., Inc. (United States)
Blaine D. Johs, J.A. Woollam Co., Inc. (United States)
Craig M. Herzinger, J.A. Woollam Co., Inc. (United States)
James N. Hilfiker, J.A. Woollam Co., Inc. (United States)
Ron A. Synowicki, J.A. Woollam Co., Inc. (United States)
Corey L. Bungay, J.A. Woollam Co., Inc. (United States)

Published in SPIE Proceedings Vol. 10294:
Optical Metrology: A Critical Review
Ghanim A. Al-Jumaily, Editor(s)

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