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Proceedings Paper

Two-axis micromirror scanner
Author(s): Michael D. Johnson; Nicolas G. Loebel; Mark L. Gitlin; Norman F. Paradise
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Paper Abstract

Two-axis scanning is generally accomplished using two separate single-axis scanners. In order to improve the functionality of a dual-axis scanning system and eliminate aperture transfer problems, MedCam, Inc. has developed a two-axis single deflector scanner using MEMS and micromachining techniques. Various configurations of the MedCam microscanner have demonstrated large scan angles at high scan rates with aperture diameters ranging from 1 mm to 10 mm. The scanner is extremely compact and may be used in small, portable applications.

Paper Details

Date Published: 2 July 1999
PDF: 8 pages
Proc. SPIE 3787, Optical Scanning: Design and Application, (2 July 1999); doi: 10.1117/12.351659
Show Author Affiliations
Michael D. Johnson, MedCam, Inc. (United States)
Nicolas G. Loebel, MedCam, Inc. (United States)
Mark L. Gitlin, MedCam, Inc. (United States)
Norman F. Paradise, MedCam, Inc. (United States)

Published in SPIE Proceedings Vol. 3787:
Optical Scanning: Design and Application
Leo Beiser; Stephen F. Sagan; Gerald F. Marshall, Editor(s)

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