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Proceedings Paper

Liquid crystal on VLSI silicon optical phased array
Author(s): Jay E. Stockley; Darius Subacius; Steven A. Serati
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Paper Abstract

Currently VLSI foundries are pushing for small feature size and higher operating voltages. These ongoing developments in integrated circuit fabrication processes result in devices exhibiting excellent electrical performance, but poor optical quality. Increased reflectivity and planarization are necessary to produce high efficiency beam steering devices. Steps taken to improve optical performance of silicon backplanes will also be discussed.

Paper Details

Date Published: 2 July 1999
PDF: 10 pages
Proc. SPIE 3787, Optical Scanning: Design and Application, (2 July 1999); doi: 10.1117/12.351635
Show Author Affiliations
Jay E. Stockley, Boulder Nonlinear Systems, Inc. (United States)
Darius Subacius, Boulder Nonlinear Systems, Inc. (United States)
Steven A. Serati, Boulder Nonlinear Systems, Inc. (United States)


Published in SPIE Proceedings Vol. 3787:
Optical Scanning: Design and Application
Leo Beiser; Stephen F. Sagan; Gerald F. Marshall, Editor(s)

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