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Proceedings Paper

Adaptive input shaping for precision stage systems
Author(s): Douglas A. Hamilton; Gerald A. Sullivan; Dryver R. Huston
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Paper Abstract

Many manufacturing situations such as lithography for microelectronics require rapid high precision positioning of machinery. This paper will describe an existing stage system and its evolution with an emphasis upon reducing residual vibrations associated with stage stepping. Results of an experimental study are presented where the adaptive input shaping strategy and several input shaping strategy technique for the literature are used to generate motion commands. Stage performance is evaluated with an emphasis upon the affects of the stages natural frequency and mode shapes.

Paper Details

Date Published: 9 July 1999
PDF: 9 pages
Proc. SPIE 3674, Smart Structures and Materials 1999: Industrial and Commercial Applications of Smart Structures Technologies, (9 July 1999); doi: 10.1117/12.351567
Show Author Affiliations
Douglas A. Hamilton, Univ. of Vermont (United States)
Gerald A. Sullivan, Univ. of Vermont (United States)
Dryver R. Huston, Univ. of Vermont (United States)


Published in SPIE Proceedings Vol. 3674:
Smart Structures and Materials 1999: Industrial and Commercial Applications of Smart Structures Technologies
Jack H. Jacobs, Editor(s)

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