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Proceedings Paper

EUV scattering and flare of 10X projection cameras
Author(s): Eric M. Gullikson; Sherry L. Baker; John E. Bjorkholm; Jeffrey Bokor; Kenneth A. Goldberg; John E. M. Goldsmith; Claude Montcalm; Patrick P. Naulleau; Eberhard Adolf Spiller; Daniel Gorman Stearns; John S. Taylor; James H. Underwood
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Paper Abstract

Two new Schwarzschild cameras have been fabricated for the EUV 10x microstepper. The surface topography of the mirrors was characterized over the full range of spatial frequencies both before and after multilayer coating. EUV scattering from the individual mirrors was measured and compared with the surface profilometry. A knife-edge test was used to directly measure the flare of the assembled cameras. The flare measured in this way is in excellent agreement with the contrast of isolated printed lines and with the point spread function of the camera as determined by EUV interferometry. The measured flare of the camera is also in good agreement with the flare calculated from the combined surface profile measurements of the individual mirrors. Consistent with the improvements made in the surface finish of the mirror substrates, a significant reduction in the flare is observed as compared with previously existing cameras.

Paper Details

Date Published: 25 June 1999
PDF: 7 pages
Proc. SPIE 3676, Emerging Lithographic Technologies III, (25 June 1999); doi: 10.1117/12.351162
Show Author Affiliations
Eric M. Gullikson, Lawrence Berkeley National Lab. (United States)
Sherry L. Baker, Lawrence Livermore National Lab. (United States)
John E. Bjorkholm, Intel Corp. (United States)
Jeffrey Bokor, Lawrence Berkeley National Lab. (United States)
Kenneth A. Goldberg, Lawrence Berkeley National Lab. (United States)
John E. M. Goldsmith, Sandia National Labs. (United States)
Claude Montcalm, Lawrence Livermore National Lab. (United States)
Patrick P. Naulleau, Lawrence Berkeley National Lab. (United States)
Eberhard Adolf Spiller, Lawrence Livermore National Lab. (United States)
Daniel Gorman Stearns, OS Associates (United States)
John S. Taylor, Lawrence Livermore National Lab. (United States)
James H. Underwood, Lawrence Berkeley National Lab. (United States)


Published in SPIE Proceedings Vol. 3676:
Emerging Lithographic Technologies III
Yuli Vladimirsky, Editor(s)

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