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Proceedings Paper

Regular microfilters based on PTFE
Author(s): Vladimir Nazmov; Valery F. Pindyurin; Lubov A. Mezentseva; B. V. Mchedlishvili; Alexander I. Vilensky
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Paper Abstract

The phenomenon of anisotropic ablation of PTFE under SR is studied. Heat conductivity and melting point of PTFE came down under irradiation. The possibility of SR-assisted formation of regular microporous membranes with average diameter of 0,5 micrometers of the pores in PTFE films is investigated.

Paper Details

Date Published: 25 June 1999
PDF: 4 pages
Proc. SPIE 3676, Emerging Lithographic Technologies III, (25 June 1999); doi: 10.1117/12.351151
Show Author Affiliations
Vladimir Nazmov, Budker Institute of Nuclear Physics (Russia)
Valery F. Pindyurin, Budker Institute of Nuclear Physics (Russia)
Lubov A. Mezentseva, Budker Institute of Nuclear Physics (Russia)
B. V. Mchedlishvili, Crystallography Institute (Russia)
Alexander I. Vilensky, Crystallography Institute (Russia)


Published in SPIE Proceedings Vol. 3676:
Emerging Lithographic Technologies III
Yuli Vladimirsky, Editor(s)

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