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Proceedings Paper

Algorithm for controlling objective lens temperature
Author(s): Weiming Chen; Chao He; Yeyi Liu
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Paper Abstract

An algorithm for controlling DSW objective lens temperature is discussed in this paper. By applying a fuzzy control algorithm on the basis of PID control algorithm, we specify different P, I, and D values according to different ranges of temperature and different temperature tendencies. As a result, we gain high precision of temperature control.

Paper Details

Date Published: 14 June 1999
PDF: 5 pages
Proc. SPIE 3677, Metrology, Inspection, and Process Control for Microlithography XIII, (14 June 1999); doi: 10.1117/12.350825
Show Author Affiliations
Weiming Chen, Institute of Optics and Electronics (China)
Chao He, Institute of Optics and Electronics (China)
Yeyi Liu, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 3677:
Metrology, Inspection, and Process Control for Microlithography XIII
Bhanwar Singh, Editor(s)

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