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Proceedings Paper

Sensitivity analysis of fitting for scatterometry
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Paper Abstract

The sensitivity analysis of fitting (SAF) is a formalism that determines the type of measurements that yields optimum determination precision. SAF is applied to ellipsometric- scatterometry of surface relief gratings and for the optimum measurement configuration predicts a significant improvement compared to the conventional scatterometry measurement configurations. The SF predictions for precision are compared to actual values obtained experimentally, and a qualitative agreement is obtained. The discrepancies between theory and experiment are likely due to inaccurate modeling of the grating.

Paper Details

Date Published: 14 June 1999
PDF: 7 pages
Proc. SPIE 3677, Metrology, Inspection, and Process Control for Microlithography XIII, (14 June 1999); doi: 10.1117/12.350805
Show Author Affiliations
Petre-Catalin Logofatu, Univ. of New Mexico (United States)
John Robert McNeil, Univ. of New Mexico (United States)

Published in SPIE Proceedings Vol. 3677:
Metrology, Inspection, and Process Control for Microlithography XIII
Bhanwar Singh, Editor(s)

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