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Proceedings Paper

Finite element simulation and optimization of piezoelectric suspensions
Author(s): Zhimin He; Wei Guo; Qinghua Li; Enghong Ong; Tony Huang
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Paper Abstract

The resonance modes and the displacement sensitivity of a dual-stage, piezoelectric micro-actuator/suspension for high track density magnetic recording systems were investigated by finite element method. Theoretical dynamic and electrostatic analyses were performed to investigate the resonance frequency of in-plane bending mode and the displacement sensitivity of the piezoelectric actuator with different shapes. Based upon the analyses of piezoelectric actuators, the optimization of piezoelectric suspension was conducted to achieve a high resonance frequency of sway mode and large displacement sensitivity. The finite element simulation results on a planar piezoelectric suspension agree quite well with the experimental measurements using a Laser Doppler Vibrometer. The optimized piezoelectric suspension demonstrates better performances than those of the planar piezoelectric suspension.

Paper Details

Date Published: 9 June 1999
PDF: 8 pages
Proc. SPIE 3668, Smart Structures and Materials 1999: Smart Structures and Integrated Systems, (9 June 1999); doi: 10.1117/12.350688
Show Author Affiliations
Zhimin He, Data Storage Institute/National Univ. of Singapore (Singapore)
Wei Guo, Data Storage Institute/National Univ. of Singapore (Singapore)
Qinghua Li, Data Storage Institute/National Univ. of Singapore (Singapore)
Enghong Ong, Data Storage Institute/National Univ. of Singapore (Singapore)
Tony Huang, Data Storage Institute/National Univ. of Singapore (Singapore)


Published in SPIE Proceedings Vol. 3668:
Smart Structures and Materials 1999: Smart Structures and Integrated Systems
Norman M. Wereley, Editor(s)

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